发明名称 Two step wire bond process
摘要 A two step wire bonding process is used to ultrasonically attach a wire (18) to a contact pad (13) on a semiconductor device (10). A first step is used to flatten a rounded tip (19) of the wire (18), and to start the bonding process. This is accomplished by applying a relatively large force to the rounded tip (19), and a relatively low vibrating displacement to the flattened wire tip (19). During a second step the large force is reduced, however; the vibrating displacement is increased. The total time for the two step wire bonding process is slightly less than a prior art one step process.
申请公布号 US6461898(B1) 申请公布日期 2002.10.08
申请号 US20000630467 申请日期 2000.08.01
申请人 MOTOROLA, INC. 发明人 KWON SEOK MO;CHOE SI HYUN
分类号 H01L21/60;H01L21/603;H01L21/607;(IPC1-7):H01L21/48 主分类号 H01L21/60
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