发明名称 Diffractive optical element
摘要 A diffractive optical element has a plurality of step-like patterns each having surface levels of a number less than eight, the step-like patterns being disposed in combination to provide a function of a step-like structure of eight or more levels.
申请公布号 US6462875(B1) 申请公布日期 2002.10.08
申请号 US20000487305 申请日期 2000.01.19
申请人 CANON KABUSHIKI KAISHA 发明人 ISHII HIROYUKI
分类号 H01L21/027;G02B5/18;G02B27/44;G03F7/20;G03F7/22;G03H1/08;(IPC1-7):G02B5/18;G02B5/32 主分类号 H01L21/027
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