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发明名称
摘要
申请公布号
JP3332205(B2)
申请公布日期
2002.10.07
申请号
JP19970077506
申请日期
1997.03.28
申请人
发明人
分类号
H01L41/107;H01L41/187;H02M3/24;(IPC1-7):H01L41/187
主分类号
H01L41/107
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