| 摘要 |
PURPOSE:To achieve an analysis which enables the obtaining of better results for a particulate sample by performing a simulation calculation of the trace of one electron in a sample as given when the electron accelerated by a specified acceleration voltage is impinged into a sample model. CONSTITUTION:A composition ratio of elements of a sample model is assumed to perform a simulation calculation of the trace of one electron in a sample as given when the electron accelerated by a specified voltage is impinged into the model. The intensity of characteristic X rays of component elements which are radiated during the motion of the electron is calculated with the absorption thereof taken into consideration until leaving a sample ball. The calculation is carried out for numerous electrons and an intensity ratio of the characteristic X rays between the components is determined from the total sum of the characteristic X rays of the component elements. On the other hand, an actual sample is irradiated with an electron beam at a specified acceleration voltage and the intensity of the characteristic X rays of the components is determined. Then, this calculation is repeated varying the assumed composition so that the intensity ratio of the characteristic X rays of the components obtained by the calculation coincides with the actually measured value and the assumed component when the coincidence is found is defined to be the results of a quantitative analysis of the sample. |
