COMPOSITION FOR PRODUCING MATERIAL HAVING NANO-SIZED PORES

摘要

PURPOSE: A composition for producing a material having nano-sized pores is provided, thereby providing a layer-insulation membrane with a pore size of 50 angstrom or less for a semiconductor. CONSTITUTION: The composition for producing a material having nano-sized pores comprises 0.1 to 95 wt.% of cyclodextrin derivative, a thermostable organic or inorganic matrix precursor; and 20 to 99.9 wt.% of a solvent dissolving the above substances, wherein the cyclodextrin derivative is represented by formula(6), in which R1, R2 and R3 are independently halogen, C0-C10 amino or azido, C3-C20 imidazole or pyridin, C1-C10 cyano, C2-C10 carbonate, C1-C10 carbamate or -OR4; R4 is hydrogen, C2-C3 acyl, C1-C2 alkyl, C3-C10 alkene, C3-C20 alkyne, C7-C20 tosyl, C1-C10 mesyl, C0-C10 phosphorus, C3-C10 cycloalkyl, C1-C20 carboxy alkyl, glucosyl, maltosyl or Sir1r2r3; r1, r2 and r3 are independently C1-C5 alkyl, C1-C5 alkoxy or C6-C20 aryl; and q is an integer of 6 to 12.