ULTRAPURE WATER PRODUCING EQUIPMENT

摘要

PURPOSE: To provide an ultrapure water producing equipment capable of reducing deficiency attributable to impurities generated after a unit equipment is replaced. CONSTITUTION: The ultrapure water producing equipment is constituted that TOC-UV1, CP-2 and a UF membrane 3 are disposed in order from the upstream side of a pure water supply channel 9 and the ultrapure water which has passed through the membrane 3 is supplied to a use point, and a branched channel 8 branched from the channel 9 is provided in the downstream of the membrane 3, a dissolved oxygen concentration meter M1 is inserted into the channel 8 to measure the dissolved oxygen concentration of the ultrapure water which has passed through the membrane 3 and also, the channel 8 is connected to an oxidizing substance decomposing equipment 11 and all of the oxidizing substances contained in the ultrapure water passing through the channel 8 are converted into DO(dissolved oxygen) in the equipment 11.