| 摘要 |
PURPOSE: A plate assembly is provided to align a substrate loaded on a plate by using a member for aligning the substrate. CONSTITUTION: A plate assembly(10) includes a plate(100) on which a substrate is loaded. In addition, the plate assembly(10) includes a pin(110) installed on the plate(100). The pin(110) is moved to an upper and a lower direction when the substrate is transferred. The substrate is transferred from a cassette to the plate assembly(10) by using a transfer member. The transfer member is positioned on an upper portion of the plate(100). At this time, the pin(110) is moved to the upper direction in order to support the substrate. The pin(110) is moved to the lower direction to load the substrate on the plate(100). The transfer member is located in a space between the pin(110) and the plate(100) and the pin(110) is moved to the lower direction. A guide fence(120) is installed in a circumference of the plate(100) in order to align a position of the substrate loaded on the plate(100).
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