ROTATION APPARATUS OF ELEVATOR PLATE IN ION IMPLANTATION EQUIPMENT

摘要

PURPOSE: A rotation apparatus of an elevator plate in ion implantation equipment is provided to reduce a component cost by forming a projection having a changeable structure to exchange only a projection of an elevator plate instead of the elevator plate. CONSTITUTION: A cassette support plate(43) is installed on an upper surface of an elevator plate(120). A projection(123) is installed on one side of a body(121) of the elevator plate(120). The projection(123) is inserted into a ring portion(60a) of a link bar(60) installed in a sidewall inside a load lock chamber(10). The projection(123) is used for rotating the elevator(120) as much as a predetermined angle. The projection(123) is fixed to the body(121) by using a combination screw. The projection(123) has an exchangeable structure in order to separate only a predetermined side of the projection(123) which is contacted with the link bar(60).