摘要 |
PROBLEM TO BE SOLVED: To improve the efficiency of test works requested by a client. SOLUTION: An input/output controller 6 in a semiconductor tester 2 temporarily stores execute instructions sent from virtual terminals 4a-4n in an input instruction spool 12, and sends them to an input instruction controller 14 for forming the execute instructions into data which are then sent to an executing section 5 of the tester 2 to execute the instructions. An output end sorter 18 sorts a test result by an output end and outputs them thereto. For outputting the test result data to a terminal of the client, an output data compressor 16 compresses the data to decrease an information quantity. |