LITHOGRAPHIC PROJECTION APPARATUS, POSITIONING SYSTEM, FABRICATING METHOD THEREOF, DEVICE FABRICATED THEREBY AND COMPUTER PROGRAM

摘要

PURPOSE: A lithographic projection apparatus is provided to determine the initial position of a transfer unit of a planar motor by including a positioning system having the planar motor with a stator and a translator such that the positioning system positions an object table. CONSTITUTION: One of the stator and the translator includes a plurality of energizable coils. A plurality of the energizable coils are energized in turn with an oscillating signal sufficient to cause vibrations of the translator having an amplitude less than the period of a periodic magnet structure(13,14,15). The vibration of the translator is measured. The phase relationship between the translator and the stator is determined based on the measure vibrations. Alternatively, the relationship between the stator and the translator is determined by detecting means detecting distinct optical marks on the periodic magnet array. Control means determine the relationship between the translator and the stator on the basis of detected distinct optical marks.