Plasma cleaning system for cavities, is integrated into component or plant and includes gas supply and extraction system with electrode producing plasma

摘要

The plasma cleaning unit is integrated into the component or plant. A process gas supply (8) and extraction system is included for the cavity (2). Mounted in or on the cavity, an electrode (5) produces the plasma. The plasma cleaning unit is integrated into the component or plant. A process gas supply (8) and extraction system is included for the cavity (2). Mounted in or on the cavity, an electrode (5) produces the plasma. An Independent claim is included for a method cleaning a cavity in a machine component or plant.