| 摘要 |
PROBLEM TO BE SOLVED: To provide a positioning table that can adsorb and hold an electronic part securely even if its shape and size are different. SOLUTION: After a first recognition camera recognizes a position of an electronic part to be fixed and a wafer table is moved for correction, adsorption nozzles of a transfer apparatus are positioned directly above the relevant electronic part. Then, each adsorption nozzle goes down to adsorb and pull out the part, the transfer apparatus moves to mount the part on any of mounting sections (79, 80, 81) of a positioning table 72. At this point, if the electronic part is a tabular electronic part such as a leadless bare chip, for example, an X-axis driving motor 73 is driven to move such that the mounting section 79 on the right of the positioning table 72 positions on a predetermined position to mount the part on the mounting section 79. The electronic part mounted on the mounting section 79 is adsorbed and held on the mounting section 79 by a communication path communicating to a vacuum source and a vacuum adsorption hole 82.
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