METHOD FOR FORMING INSULATING OXIDE FILM

摘要

PROBLEM TO BE SOLVED: To provide a method for forming an insulating oxide film with superior electric characteristics, wherein oxidation is prevented from advancing into a substrate during the period of deposition of the oxide film. SOLUTION: The insulating oxide film with superior electric characteristics can be formed by switching oxidizing gases to be supplied or separating gas components under control to prevent oxidation from advancing into a substrate.