发明名称 METHOD OF MANUFACTURING p-TYPE SEMICONDUCTOR CRYSTAL
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method for a p-type semiconductor crystal, which has high activation factor in a wide-gap semiconductor. SOLUTION: In the method of manufacturing a p-type semiconductor crystal by subjecting the semiconductor crystal to donor acceptor simultaneous doping, the semiconductor crystal (for example, ZnO) is supplied intermittently with donor impurities (for example, Ga), in the manufacturing process of the p-type semiconductor crystal.
申请公布号 JP2002289918(A) 申请公布日期 2002.10.04
申请号 JP20010088034 申请日期 2001.03.26
申请人 SHARP CORP;KAWASAKI MASASHI 发明人 SAITO HAJIME;KAWASAKI MASASHI
分类号 C30B29/16;H01L21/203;H01L21/205;H01L33/28 主分类号 C30B29/16
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