METHOD, DEVICE TO RADIATE BEAM, AND METHOD OF MANUFACTURING RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To obtain a high quality original optical disk by shortening the writing time and forming high precision pits in shape and position by using electron beam lithography when manufacturing original optical disks. SOLUTION: The electron beam is radiated matching its deflection and the movement of the stage on which the original disk is loaded and for a longer time while making its blanking time short.