ELECTRON BEAM GENERATOR, DEVICE FOR LASER BEAM MACHINING AND MANUFACTURING METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide an electron beam generator which has a space profile like a top hat and uses a laser beam. SOLUTION: An optical diffraction element is disposed in an optical path of a laser beam which is emitted from a laser beam source. A laser beam which is diffracted by the optical diffraction element irradiates a photocathode. A plateau area of a distribution pattern of a power density in a diffracted image on the photocathode is larger than that of a distribution pattern of a power density in a cross section of the laser beam before entering the optical diffraction element.