发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device that can be increased in operating speed, while maintaining a high breakdown voltage and a low on-resistance. SOLUTION: This semiconductor device has an SOI structure, in which a semiconductor layer 3 is formed on a semiconductor supporting substrate 1 via an insulation layer 2. In the p-type well region 5 of this device, a gate electrode 9 is formed on the potion interposed between an n-type source region 6 and an n-type drain region 4 via a gate insulating film 8. In the semiconductor layer 3, n-type semiconductor regions 3a and SiO2 insulating regions 14 respectively heading the n-type drain region 4 from the p-type well region 5 are formed alternately in the gate width direction in the portions interposed between the regions 5 and 4. In the insulation regions 14, embedded electrodes 15 heading the drain region 4 from the well region 5 are embedded in the intermediate sections in the gate width direction. The embedded electrodes 15 are electrically connected to source electrodes 11 via wiring 17.
申请公布号 JP2002289866(A) 申请公布日期 2002.10.04
申请号 JP20010091304 申请日期 2001.03.27
申请人 MATSUSHITA ELECTRIC WORKS LTD 发明人 YOSHIDA TAKESHI;SUZUMURA MASAHIKO;SUZUKI YUJI;HAYAZAKI YOSHIKI;SHIRAI YOSHIFUMI;KISHIDA TAKASHI;TAKANO KIMIMICHI;YOSHIHARA TAKAAKI
分类号 H01L21/28;H01L21/3205;H01L23/52;H01L29/417;H01L29/78;H01L29/786 主分类号 H01L21/28
代理机构 代理人
主权项
地址