摘要 |
PROBLEM TO BE SOLVED: To continuously form stable high-temperature and high-density plasma without damaging surrounding optical elements, an X-ray detector and the like by flying of fast fine particles from a target material. SOLUTION: Since plasma is formed by irradiating a leading edge of a high- density injection gas stream formed by heating and vaporizing a target material 102 by a light beam 202 for preheating with a converged main laser beam 201, the generation of fast fine particles by the target material can be prevented. After formation of the plasma, broken fine particles released from the target material are heated by a light beam 203 for evapotranspiration timely controlled to be evaporated or vaporized, whereby release of the fast fine particles by the target material can be prevented and extinguished. Accordingly, the fine particles still generated by the formation of plasma by the preheating are almost completely evaporated or vaporized. |