| 摘要 |
PROBLEM TO BE SOLVED: To provide a neutral particle beam treatment device which can apply a large-bore beam to an object to be treated, with low-cost and compact constitution, and is hard to damage the object to be treated. SOLUTION: This neutral particle beam treatment device is equipped with a holder 20 which holds the object to be treated, a plasma generator which generates plasma within a vacuum chamber 3 by applying a high frequency electric field, an orifice electrode 4 which is arranged between the substance X to be treated and a plasma generator, a grid electrode 5, and a bipolar power source 102 which accelerates negative ions 6 from the generated plasma and passes them through the orifice 4a made in the orifice electrode 4 by applying voltage between the orifice electrode 4 as an anode and the grid electrode 5 during stoppage of a high-frequency electric field. |
