METHOD FOR FORMING PATTERN BY LIFT-OFF METHOD APPLYING PHOTOCATALYST EFFECT

摘要

PROBLEM TO BE SOLVED: To greatly contribute to labor saving and low cost production and dramatically improve overall process yield by reducing the number of processes. SOLUTION: A method for forming a thin film comprises steps for: forming a pattern of a soluble metal film on a substrate having a light catalystic surface or on a substrate created by a light catalyst by applying a light catalytic effect; forming the thin film on which a pattern is scheduled to be formed; and forming a lift-off pattern by a solution removing the soluble metal film with the thin film created on it and on which the pattern is scheduled to be formed.