| 摘要 |
PROBLEM TO BE SOLVED: To provide a corona discharge device wherein not only adhered materials such as silicon or the like but also those of soft substances can be removed easily from a plate-formed electrode and wherein breakage of a tip part of the plate-formed electrode can be prevented. SOLUTION: This device is equipped with the plate-formed electrode 31 formed in a serration state, cleaning parts 34, 34 of the plate-formed electrode having a contact face of a convex curved face state to contact with both side faces of the plate-formed electrode 31, and a transportation means to move the cleaning parts 34, 34 of the plate-formed electrode along a longitudinal direction of the plate-formed electrode 31. As the contact face of the cleaning parts 34, 34 of the plate-formed electrode successively and gradually contacts along the convex curved face shape toward an acute angle point of the tip of the plate-formed electrode 31, a sudden force will not work on the acute angle point of the tip of the plate-formed electrode 31, thereby the adhered materials adhered to the plate-formed electrode 31 are removed by the frictional force between the cleaning parts 34, 34 of the plate-formed electrode and the plate-formed electrode 31 without damaging the acute angle point of the tip of the plate-formed electrode 31.
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