| 摘要 |
A monitoring system for sensing temperature inside a process chamber 11 of processing apparatus comprises a fluid flow duct 12 extending through the chamber 11 and temperature sensors 16 for sensing the temperature of fluid flowing along the duct 12. The fluid in the flow duct 12 exhibits a mass which will take time to change temperature. The output of the sensors 12 can be used to provide an accurate determination of the effect of the process on a product carried through the chamber 10, by knowing the relationship between the temperature coefficient of the fluid and the temperature coefficient of the products being processed.
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