PHASE SHIFTING MASK BLANK, PHASE SHIFTING MASK AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a phase shifting mask blank provided with at least one phase shifting layer on a transparent substrate, in which the phase shifting layer comprises at least a metal and germanium. SOLUTION: The high quality phase shifting mask blank and the phase shifting mask the film thickness of which necessary to change the phase difference by 180 deg. can be decreased are obtained by forming the phase shifting layer comprising at least a metal such as molybdenum, and germanium.