发明名称 |
ADHESIVE SHEET, SEMICONDUCTOR DEVICE AND METHOD PRODUCING THE DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To obtain an adhesive sheet used as a dicing tap in a dicing process, having excellent bonding reliability between a semiconductor device and a support member. SOLUTION: This adhesive sheet has an adhesive layer containing (A) an epoxy resin and an epoxy resin curing agent, (B) a high-molecular weight component which contains a functional monomer and >=100,000 weight-average molecular weight and (C) a radiation-polymerizable compound and a substrate layer >40 mN/m surface tension. The adhesive sheet has thermal polymerizability and radiation polymerizability. |
申请公布号 |
JP2002285109(A) |
申请公布日期 |
2002.10.03 |
申请号 |
JP20010083127 |
申请日期 |
2001.03.22 |
申请人 |
HITACHI CHEM CO LTD |
发明人 |
KAWAKAMI HIROYUKI;HASEGAWA YUJI |
分类号 |
C09J7/02;C09J4/02;C09J163/00;H01L21/301;H01L21/52;(IPC1-7):C09J7/02 |
主分类号 |
C09J7/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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