发明名称 ADHESIVE SHEET, SEMICONDUCTOR DEVICE AND METHOD PRODUCING THE DEVICE
摘要 PROBLEM TO BE SOLVED: To obtain an adhesive sheet used as a dicing tap in a dicing process, having excellent bonding reliability between a semiconductor device and a support member. SOLUTION: This adhesive sheet has an adhesive layer containing (A) an epoxy resin and an epoxy resin curing agent, (B) a high-molecular weight component which contains a functional monomer and >=100,000 weight-average molecular weight and (C) a radiation-polymerizable compound and a substrate layer >40 mN/m surface tension. The adhesive sheet has thermal polymerizability and radiation polymerizability.
申请公布号 JP2002285109(A) 申请公布日期 2002.10.03
申请号 JP20010083127 申请日期 2001.03.22
申请人 HITACHI CHEM CO LTD 发明人 KAWAKAMI HIROYUKI;HASEGAWA YUJI
分类号 C09J7/02;C09J4/02;C09J163/00;H01L21/301;H01L21/52;(IPC1-7):C09J7/02 主分类号 C09J7/02
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