| 摘要 |
PROBLEM TO BE SOLVED: To manufacture a probe unit appropriately supported in a substrate without damaging a lead or an elastic beam in the fabrication of the probe unit having the elastic beam projecting from the substrate, and appropriately keeping a pitch even if the pitch between adjacent beams is very small. SOLUTION: The probe unit in which the tip of the lead is projected from the end of the substrate is manufactured in such a way that a pseudo-layer is installed inside a recess of the substrate, the lead extending from the substrate to the pseudo-layer is formed, a notch reaching a part of the pseudo-layer from the back side through the substrate is formed, and the residual pseudo-layer is removed. The probe unit is manufactured in such a way that the lead is formed on the substrate in which a through-hole is formed or on chemically cuttable glass, and a metal layer or chemically cuttable glass at the tip of the lead is selectively etched. |
