| 摘要 |
PROBLEM TO BE SOLVED: To provide a tilt sensor and a tilt sensor unit which are small-sized and have no operation part and detect a tilt as a thermal sensor which uses a microheater. SOLUTION: A thin film sensor part is formed on the top surface of an Si (100) substrate and insulating films are formed on both the surfaces of the substrate. A metal thin film is formed on the top surface of the Si substrate and an insulating film for a mask is formed thereupon. The insulating film for the mask is patterned in the shape of a resistance for heat resistance by photolitbography and etched. At this time, the two resistance bodies have the same resistance value and the same shape, the metal thin film is etched by using the etched insulating film for the mask as a mask and an insulating film for passivation is formed on the top surface. Holes of opening parts of a pad for an electrode and a moat are bored. The moat is formed below the thin film resistance body by anisotropic etching and a microbridge structure is formed as a microbridge structure by anisotropic etching using an etchant.
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