发明名称 |
Capacitance type humidity sensor and manufacturing method of the same |
摘要 |
A capacitance type humidity detecting sensor has two electrodes opposing each other with a gap interposed therebetween to form a capacitor on a silicon substrate with a silicon oxide film formed on a surface thereof. A moisture-sensitive film is formed so as to cover the two electrodes with a silicon nitride film interposed therebetween. The silicon nitride film protects the two electrodes from moisture passing through the moisture-sensitive film. The capacitance formed between the two electrodes changes in accordance with ambient humidity. A switched capacitor circuit formed in a circuit element portion processes a signal indicative of a change in the capacitance formed between the two electrodes.
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申请公布号 |
US2002141136(A1) |
申请公布日期 |
2002.10.03 |
申请号 |
US20020157197 |
申请日期 |
2002.05.30 |
申请人 |
TOYODA INDO;MATSUHASHI HAJIME;ASAMI KAZUSHI |
发明人 |
TOYODA INDO;MATSUHASHI HAJIME;ASAMI KAZUSHI |
分类号 |
G01N27/22;(IPC1-7):H01G4/35 |
主分类号 |
G01N27/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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