| 摘要 |
A pattern data converting method comprises reconstructing the design data into column regions, segmenting the column region into apparatus strips, and extracting unit data of the design data for each apparatus strip, wherein reconstructing the design data includes defining an rectangular region start code and a rectangular region end code to the rectangle regions, collating the rectangular region start and end codes, dividing the rectangular regions at the Y coordinate of the other rectangular region, and subjecting the rectangular region start code and rectangular region end code having the same Y coordinates to the region operation. |
