METHOD AND PROBE FOR HIGH TILE ANGLE-SHAPE MEASUREMENT

摘要

PROBLEM TO BE SOLVED: To provide a high tilt angle-shape measuring method which can measure and evaluate the effective diameters of a high tilt angle lens which has an edge face and a lens put in a lens barrel. SOLUTION: A measurement is taken by profiling the top surface of a body to be measured by using a probe for measurement which has a stylus tip which is symmetrical about the axis of rotation, >=60 deg. in tilt angle, <=5μm in radius of curvature, and made <=0.1μm in the sphericity of its curvature part up to a 60 deg. tilt angle.