| 摘要 |
A turbomolecular pump (10) comprises a stator, a pump rotor, a motor (28) fo r driving the pump rotor and a control device (42). The control device (42) controls the motor output as to prevent the motor output from exceeding a permissible motor maximum output. Stator-side temperature sensors (32-38), which are provided for measuring the stator temperature, are arranged on the turbomolecular pump (10). The control device (42) comprises a maximum output determining device (50), that establishes the permissible motor maximum outp ut according to the measured stator temperature. The permissible motor maximum output is thus not set to a constant value, but is always determined accordi ng to the stator temperature. This results in the power of the motor being full y exploited as long as the measured stator temperature is less than a maximum value.
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