Method and system for efficiently scheduling multi-chamber fabrication tool capacity

摘要

Within both a method for operating a multi-chamber fabrication tool and a system for operating the multi-chamber fabrication tool, there is first provided a multi-chamber fabrication tool comprising a series of chambers. There is also defined for each chamber within the series of chambers a minimum of one fabrication process to provide a series of fabrication processes corresponding with the series of chambers, wherein at least one fabrication process may be undertaken within more than one chamber and at least one chamber has defined therein more than one fabrication process including the at least one fabrication process which may be undertaken within more than one chamber. There is also processed within the multi-chamber fabrication tool a substrate while employing the at least one fabrication process which may be undertaken within more than one chamber, wherein a chamber within which is processed the substrate while employing the at least one fabrication process which may be undertaken within more than one chamber is selected such as to optimize utilization of the multi-chamber fabrication tool.