摘要 |
A trap 10 for condensable liquids, such as tantalum pentoxide, has a primary trapping chamber 50 surrounding a secondary trapping chamber 90 and a sump 11 connected by a small enough opening to the primary or secondary chamber such that trapped liquid in the sump 11 is effectively isolated from a gas flow through the primary and secondary chambers. Partitions and openings in the primary and secondary chambers enhance condensation while allowing condensed liquid flow that does not clog the primary and secondary chambers against the gas flow. |