发明名称 TRAP APPARATUS AND METHOD FOR CONDENSABLE BY-PRODUCTS OF DEPOSITION REACTIONS
摘要 A trap 10 for condensable liquids, such as tantalum pentoxide, has a primary trapping chamber 50 surrounding a secondary trapping chamber 90 and a sump 11 connected by a small enough opening to the primary or secondary chamber such that trapped liquid in the sump 11 is effectively isolated from a gas flow through the primary and secondary chambers. Partitions and openings in the primary and secondary chambers enhance condensation while allowing condensed liquid flow that does not clog the primary and secondary chambers against the gas flow.
申请公布号 WO02076581(A1) 申请公布日期 2002.10.03
申请号 WO2002US07040 申请日期 2002.03.08
申请人 MKS INSTRUMENTS, INC. 发明人 GU, YOUFAN
分类号 B01D5/00;B01D8/00;B01D45/08;B01D53/00;C23C16/44;H01L21/31 主分类号 B01D5/00
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