Precise positioning actuator for head element, head gimbal assembly with the actuator and manufacturing method of head gimbal assembly

摘要

A precise positioning actuator to be fixed to a head slider provided with at least one head element and to a support, for precisely positioning the at least one head element includes a pair of movable arms and a coupling section. Each movable arm is formed by a metal plate to be substantially in parallel with a side surface of the head slider. Top end sections of the pair of movable arms are capable of displacing in response to a drive signal applied to the actuator along a direction crossing planes of the metal plate. The coupling section is connected between the top end sections of the pair of movable arms and formed by a metal plate to be substantially in parallel with a first surface of the head slider. This first surface is opposite to an air bearing surface (ABS) of the head slider. The first surface of the head slider is to be fixed to the coupling section.