| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a sample analysis and sample observation apparatus for appropriately analyze or observe a sample even if the sample drifts. SOLUTION: A drift detection means 20 reads image data obtained before analysis from a memory M11 , and reads image data obtained during analysis from a memory M21 . The drift detection means 20 detects the amount and direction of drift of the sample using the image data. A comparison means 21 compares the amount of drift that has been detected with a threshold. The comparison means 21 compares the amount of drift that has been detected with a threshold. When it is judged that the amount of drift is smaller than the threshold by the comparison, a correction means 22 performs the deflection control of electron beams so that the sample drift that is detected by the drift detection means 20 is compensated. On the other hand, when it is judged that the amount of drift is larger than the threshold, the correction means 22 moves and controls the sample stage 15 so that sample drift that is detected by the drift detection means 20 is compensated.</p> |
