| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a molecular pump, capable of quickly stopping the molecular pump for minimizing impacts on members connected to the molecular pump, even when a rotor is damaged during operation. SOLUTION: A gap allowing plastic deformation of the stator, having a section shape having an appropriate inclination to a radius direction allowing smooth deformation between the stator and a casing, and a base is provided inside of the stator. The stator is, for example, a threaded spacer and has a parallelogram or ellipse section shape. When the rotor is damaged and collides with the stator, the stator deforms smoothly, because of the gap and the stator absorbs torque and impact given by the rotor. Accordingly, screws fixing the molecular pump and pipes can be prevented from receiving a large force and the like.</p> |
