| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrooptical element that can accurately detect the voltage distribution of a highly integrated circuit pattern by an optical means, as well as a device for detecting a circuit pattern using the same. SOLUTION: An electrooptical element 100 is formed by adhering an electrooptical crystal 10 on which a reflection prevention layer 51 and a reflection film 71 that are separately manufactured, to a transparent conductive film 31 formed on a glass substrate 21 with an adhesive agent layer 41 interposed. A detecting device for circuit pattern is comprised of the electrooptical element 100, a laser light source, an optical system mechanism consisting of a beam expander, a polarization beam splitter and an optical lens, a circuit substrate, and a light detector, and it detects the intensity distribution of electric boundary generating from the circuit pattern of a highly integrated circuit substrate by using the electrooptical element 100.
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