| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a flow sensor capable of detecting flow velocities over a wide range and a flow measuring instrument capable of detecting flow quantities over a wide range by using the flow sensor. SOLUTION: This flow sensor has a heater 4 for heating a gas flowing through a gas passage 10, an upstream-side temperature sensor 13 disposed on the gas upstream side of the heater 4 and detecting a temperature of the gas to output a first temperature detection signal, a downstream-side temperature sensor 11 disposed on the gas downstream side of the heater 4 and detecting a temperature of the gas to output a second temperature detection signal, and a support substrate 2 for supporting the heater 4 and the temperature sensors 13 and 11. The heater 4 is formed so that its dimension D1 parallel to the flowing direction of the gas is larger than its dimension D2 normal to the flowing direction of the gas.</p> |
