Ti-Zr-Ni BASED HIGH TEMPERATURE SHAPE MEMORY ALLOY THIN FILM AND PRODUCTION METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide an alloy thin film which has practically sufficient mechanical properties, and exhibits a shape memorizing effect even at a high temperature of >=100 deg.C without incorporating noble metals into the composition thereof. SOLUTION: The Ti-Zr-Ni based shape memory alloy thin film has a composition containing, by atom, 6.5 to 30% Zr and 40 to 50% Ni, and the balance Ti. The thin film has a fine dual-phase structure of a (Ti, Zr) Ni phase and aλ1 phase respectively having a crystal grain size of <=500 nm.