发明名称 Method of fabricating row lines of a field emission array and forming pixel openings therethrough
摘要 A method for fabricating row lines over a field emission array employs only two mask steps to define row lines and pixel openings. A layer of conductive material is disposed over a substantially planarized surface of a grid of semiconductive material and a layer of passivation material is disposed over the layer of conductive material. Row lines and pixel openings may be formed through the passivation and conductive layers by use of a first mask. The row lines may be further defined by using a second mask to remove semiconductive material of the grid. Alternatively, a first mask may be used to fully define row lines from the layers of passivation, conductive, and semiconductive material, while a second mask may be used to define pixel openings through the layers of passivation and conductive material. Field emission arrays fabricated by such methods are also disclosed.
申请公布号 US2002142499(A1) 申请公布日期 2002.10.03
申请号 US20020157415 申请日期 2002.05.29
申请人 DERRAA AMMAR 发明人 DERRAA AMMAR
分类号 H01J3/02;H01J9/02;(IPC1-7):H01L33/00 主分类号 H01J3/02
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