发明名称 Ferroelectric memory device and method of manufacturing the same
摘要 A method of manufacturing a ferroelectric memory device includes a step of forming a first region (24) having surface characteristics allowing the material for the members of a ferroelectric capacitor section to be preferentially deposited, and a second region (26) having surface characteristics allowing the material for the capacitor section to be less deposited than the first region (24), and a step of providing the material on the base (10) to form a first electrode (32), a ferroelectric film (34), and a second electrode (36) in the first region (24) of the base (10).
申请公布号 US2002142491(A1) 申请公布日期 2002.10.03
申请号 US20020153925 申请日期 2002.05.24
申请人 SEIKO EPSON CORPORATION 发明人 SHIMODA TATSUYA;NISHIKAWA TAKAO
分类号 H01L21/02;H01L21/033;H01L21/316;H01L21/8246;H01L27/115;(IPC1-7):H01L21/00 主分类号 H01L21/02
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