| 摘要 |
A processor for processing microelectronic workpieces includes a process vessel (4) adapted to hold one or more microelectronic workpieces (8) horizontally within a rotatable fixture (10). A drive motor (18) is coupled to the rotatable fixture to spin the rotatable fixture during processing. A processing fluid (6) is introduced into the process vessel for processing of the microelectronic workpieces. The rotatable fixture is raised out of the processor for loading/unloading. The processor can be used to clean, plate, etch, strip, rinse, or dry microelectronic workpieces.
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