| 摘要 |
PROBLEM TO BE SOLVED: To calculate a flaw evaluation value after the feature of a flaw has been analyzed and to objectively inspect the flaw. SOLUTION: A surface flaw as an object to be inspected is classified into a first flaw group which is judged to be harmful on the basis of a flaw area, a second flaw group which is judged to be harmful due to a change in a luminance on the basis of the reference value of the luminance and a third flaw group which is a harmless flaw. Regarding each flaw in the second flaw group, the maximum value of the luminance, the minimum value of the luminance and the reference value are found. The flaw evaluation value is found by an expression of flaw evaluation value=α×flaw area+β|maximum value of luminance - reference value |+γ|minimum value of luminance -reference value |. The value of the parameter β and that of the parameter γin the expression used to find the flaw evaluation value are found in such a way that the flaw at the luminance situated in the intermediate order in the order of the second flaw group is within a prescribed order in the first flaw group. |
