发明名称 Method of the synthesis and control of PGO spin-coating precursor solutions
摘要 A method of synthesizing a PGO spin-coating precursor solution includes utilizing the starting materials of lead acetate trihydrate (Pb(OAc)2.3H2O) and germanium alkoxide (Ge(OR)4(R=C2H5 and CH(CH3)2)). The organic solvent is di(ethylene glycol) ethyl ether. The mixed solution of lead and di(ethylene glycol) ethyl ether is heated in an atmosphere of air at a temperature no greater than 185° C., and preferably no greater than 190° C. for a time period in a range of thirty minutes to four hours. During the heating step the color of the solution is monitored to determine when the reaction is complete and when decomposition of the desired product begins to take place. The solution is then added to germanium di(ethylene glycol) ethyl ether to make the PGO spin-coating solution. This second step also entails heating the solution to a temperature no greater than 190° C. for a time period in a range of 0.5 to 2.0 hours. The process results in a PGO precursor solution suitable for use in spin-coating.
申请公布号 US2002139955(A1) 申请公布日期 2002.10.03
申请号 US20010822637 申请日期 2001.03.30
申请人 ZHUANG WEI-WEI;ZHANG FENGYAN;MAA JER-SHEN;HSU SHENG TENG 发明人 ZHUANG WEI-WEI;ZHANG FENGYAN;MAA JER-SHEN;HSU SHENG TENG
分类号 H01L21/027;C01G21/00;H01L21/314;H01L21/316;H01L21/8246;H01L21/8247;H01L27/105;H01L29/788;H01L29/792;(IPC1-7):C08F12/02;H01L21/00 主分类号 H01L21/027
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