发明名称 FINE STRUCTURE AND METHOD OF MANUFACTURING FINE STRUCTURE
摘要 PROBLEM TO BE SOLVED: To provide an optical switching device which drives an optical element by an actuator and has high durability and reliability at a low cost. SOLUTION: In molding a layer of the optical element by a forming mold 70 using an epoxy resin 35 added with an optical latent polymerization initiator in the layer of the actuator 6 manufactured by a photolithography technique, the temperature of the resin 35 is controlled to >=60 to <=500 deg.C by a heater 105 and the light from a light source 125 is partially cast thereto to temporary fix the layer. As a result, the forming mold 70 and a work 20 molded with the actuator 6 can be aligned with good accuracy and the management of a film thickness is possible as well. Accordingly, the manufacture of the fine structure of the constitution laminated with the actuator 6 and the optical element is made possible and the yield thereof can be improved.
申请公布号 JP2002287043(A) 申请公布日期 2002.10.03
申请号 JP20010091339 申请日期 2001.03.27
申请人 SEIKO EPSON CORP 发明人 UEJIMA SHUNJI
分类号 G02B26/08;B81B3/00;B81C1/00;H01L41/09;(IPC1-7):G02B26/08 主分类号 G02B26/08
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