| 摘要 |
PROBLEM TO BE SOLVED: To accurately enhance precision for evaluation of a temperature sensor, in a temperature sensor inspecting method and device capable of inspecting a temperature sensor product without being affected by an ambient temperature. SOLUTION: An output value output from a measured temperature sensor 15 is measured when the temperature sensor 15 is evaluated. A temperature of a turn table 13 is measured by a contactless temperature sensor 16 to make the temperature serve as a temperature of the measured temperature sensor 15. A normal output value in the temperature (the temperature of the measured temperature sensor 15) measured by the contactless temperature sensor 16 is found based on a temperature-output value characteristic preliminarily found by a normal temperature sensor stored in a memory 23. The output value output from the measured temperature sensor 15 is compared with the normal output value to evaluate quality of the measured sensor 15.
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