发明名称 Structure and method for fabricating semiconductor structures and devices utilizing a stable template
摘要 High quality ionicly-bonded semiconductor materials can be grown overlying covalently-bonded substrates (22), such as large silicon wafers, by utilizing a stable template layer (24). The template layer is formed of material consisting of alkaline earth metal, alkaline earth metal silicide, alkaline earth metal silicate and/or Zintl-type phase material. A high-quality ionicly-bonded semiconductor material (26) may then be grown over the template layer.
申请公布号 US2002140013(A1) 申请公布日期 2002.10.03
申请号 US20010824388 申请日期 2001.04.02
申请人 MOTOROLA, INC. 发明人 YU ZHIYI;DROOPAD RAVINDRANATH;OVERGAARD COREY
分类号 C30B23/02;C30B25/02;C30B25/18;H01L21/20;(IPC1-7):H01L29/76;H01L29/94;H01L31/062;H01L31/113;H01L31/119 主分类号 C30B23/02
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