| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a stepper case which is capable of preventing a mask from acting significantly within the stepper case and can be adequately loaded with the mask in the stepper. SOLUTION: The mask 5 placed on projections 2 of the stepper case 1 are fixed into the stepper case 1 by being put between the arcuate apexes of a pair of mask stoppers 6 provided for both flanks of the stepper case 1. The mask stoppers 6 are made of material, for example, fluororesins, such as 'Teflon (R)', having cushion properties, resistance to flawing and low dusting characteristics.</p> |
