发明名称 |
DIAMOND FILM DEPOSITING APPARATUS USING MICROWAVES AND PLASMA |
摘要 |
Disclosed herewith is a diamond film depositing apparatus using microwaves and plasma. The apparatus comprises a rectangular wave guide (125), a mode transition coupler (120), an antenna rod (130), a quartz bell jar (140), a workpiece holder (116), a microwave cavity resonator (112), a source gas inflow ring (160), a mechanical support cylinder (164), a cooling jacket (165), gas inflow and outflow conduits (172 and 174) and a vacuum seal (190). The microwave cavity resonator (112) has a cylindrical shape the diameter of which is decreased in a downward direction. The microwave cavity resonator (112) may have a hemispherical shape, the flat surface of which is oriented upward. |
申请公布号 |
WO02077319(A1) |
申请公布日期 |
2002.10.03 |
申请号 |
WO2001KR00487 |
申请日期 |
2001.03.27 |
申请人 |
SMALL & MEDIUM INDUSTRY PROMOTION CORPORATION;SOHN, HEE-SIK;CHOE, WAYNE, H. |
发明人 |
SOHN, HEE-SIK;CHOE, WAYNE, H. |
分类号 |
C23C16/27;C23C16/511;H01J37/32 |
主分类号 |
C23C16/27 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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