ACTIVE COMPONENT AND PHOTOSENSITIVE RESIN COMPOSITION USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a photosensitive resin composition having high sensitivity and capable of forming a high resolution pattern. SOLUTION: The photosensitive resin composition is obtained by combining an active metal alkoxide of the formula (X)m-n -M -[(U1 )p -(U2 -Z)t ]n or its polycondensation product and an active component selected from particles of the formula P-[(Y)s - (U<1> )p -(U2 -Z)t }]k with a photosensitive agent. In the formulae, X is H, halogen, alkoxy or alkoxycarbonyl; M is a metal atom whose valence (m) is >=2; U1 is a first linking unit; U2 is a second linking unit; Z is a group which produces a solubility difference owing to irradiation with light; P is a fine particulate carrier; Y is a coupling residue; (n) is an integer of >=1; m>n; (p) is 0 or 1; (t) is 1 or 2; (k) is an integer of >=1; and (s) is 0 or 1.