发明名称 METHOD OF FORMING THICK-FILM PATTERN AND PHOTOSENSITIVE PASTE USED FOR THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a method of easily and surely forming fine thick-film patterns having excellent dimensional accuracy and shape accuracy by a transfer method and a photosensitive part used for the same. SOLUTION: The thick-film patterns of the prescribed shape are formed by previously measuring the photosetting depth d of a photosensitive paste and applying the photosensitive paste on a base in consideration of this photosetting depth d to form a photosensitive paste film of a prescribed film thickness t on the base, then subjecting the film to exposure processing, transferring the photosensitive paste film subjected to the exposure processing onto a body to be transferred, such as a ceramic green sheet and developing the film. The photosensitive paste is applied on the base in such a manner that the relation between the photosetting depth d of the photosensitive paste and the film thickness t of the photosensitive paste film satisfy conditions of equation: t<=d.
申请公布号 JP2002287375(A) 申请公布日期 2002.10.03
申请号 JP20010084659 申请日期 2001.03.23
申请人 MURATA MFG CO LTD 发明人 TOWATA SHUICHI
分类号 G03F7/004;G03F7/16;G03F7/26;G03F7/40;H05K3/12;H05K3/20 主分类号 G03F7/004
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